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Proceedings Paper

An effective way to calibrate the external errors which are contributed in the interferometric test for spherical surfaces
Author(s): Wei-Cheng Lin; Shenq-Tsong Chang; Hung-Pin Chen; Yu-Wei Lin; Hua-Lin Chen; Wei-Chun Chen; Cheng-Kuo Sung
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Paper Abstract

Optical metrology is a critical and complicated technique for the fabrication of precision optics which surface figure is better than RMS 1/30λ. The intrinsic systematic error of the experimental setup including the alignment error of the metrology tool and manufacturing error of the reference optics shall be calibrated carefully. Nevertheless, the measured consequence also includes the surface deformation caused by mounting supporter and gravity effect, which may result in a misleading judgment for surface figure correction, especially for mid- to-large optics. Besides the systematic error of experimental setup and deformation by an external condition of the optics, the environmental condition such as temperature drift, air turbulence, and vibration also affect the measured result. This paper proposes a method which adopts the magnitude and phase of each non-rotationally symmetrical Zernike coefficients grabbed from the multiple measurements from rotating the optics to analyze the absolute low-spatial frequency figures.

Paper Details

Date Published: 15 November 2019
PDF: 8 pages
Proc. SPIE 11175, Optifab 2019, 1117520 (15 November 2019); doi: 10.1117/12.2535902
Show Author Affiliations
Wei-Cheng Lin, Taiwan Instrument Research Institute (Taiwan)
Shenq-Tsong Chang, Taiwan Instrument Research Institute (Taiwan)
Hung-Pin Chen, Taiwan Instrument Research Institute (Taiwan)
Yu-Wei Lin, Taiwan Instrument Research Institute (Taiwan)
Hua-Lin Chen, Taiwan Instrument Research Institute (Taiwan)
Wei-Chun Chen, Taiwan Instrument Research Institute (Taiwan)
Cheng-Kuo Sung, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 11175:
Optifab 2019
Blair L. Unger; Jessica DeGroote Nelson, Editor(s)

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