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Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography
Author(s): Michael J. Haslinger; Amiya R. Moharana; Michael Mühlberger
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Paper Abstract

In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.

Paper Details

Date Published: 29 August 2019
PDF: 5 pages
Proc. SPIE 11177, 35th European Mask and Lithography Conference (EMLC 2019), 111770K (29 August 2019); doi: 10.1117/12.2535683
Show Author Affiliations
Michael J. Haslinger, Profactor GmbH (Austria)
Amiya R. Moharana, Profactor GmbH (Austria)
Michael Mühlberger, Profactor GmbH (Austria)

Published in SPIE Proceedings Vol. 11177:
35th European Mask and Lithography Conference (EMLC 2019)
Uwe F.W. Behringer; Jo Finders, Editor(s)

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