Share Email Print

Proceedings Paper

Novel synthesis and design methods of optical thin film structures using vanadium dioxide phase change material
Author(s): Andrew M. Sarangan
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Recent developments in phase change materials have led to a new generation of electronic and photonic memory devices and thermally tunable devices. Vanadium dioxide (VO2) and Germanium Antimoy Telluride (GST) are two of the most developed phase change materials. The focus of this work is on vanadium dioxide. Current methods of growing vanadium dioxide rely on reactive physical vapor deposition on heated and lattice-matched substrates. This is often a difficult deposition process with a very narrow process window. The high process tem- peratures, patterning and etching challenges, and the lattice-matching requirement severely limit the number of materials VO2 can co-exist with. As a result, compared to other types of inorganic optical thin film materials, the development of practical devices exploiting VO2 has been modest. In this paper, novel and simplified approaches to producing VO2 thin films is discussed, especially in regards to creating multilayer optical structures, tunable optical filters, switchable wiregrid polarizers, and tunable Bragg reflectors. The growth and characterization of nanostructured VO2 films are also discussed.

Paper Details

Date Published: 6 December 2019
PDF: 6 pages
Proc. SPIE 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019, 1137109 (6 December 2019); doi: 10.1117/12.2535617
Show Author Affiliations
Andrew M. Sarangan, Univ. of Dayton (United States)

Published in SPIE Proceedings Vol. 11371:
International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019
Partha Banerjee; Karl Gudmundsson; Akhlesh Lakhtakia; Guru Subramanyam, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?