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Proceedings Paper • Open Access

Improvements of diffractive optical element uniformity and zero order performance using lithographic process parameter optimization method (withdrawal notice)

Paper Abstract

Publisher’s Note: This paper, originally published on 18 November 2019, was withdrawn on 25 August 2021 per author request.

Paper Details

Date Published: 18 November 2019
PDF: 1 pages
Proc. SPIE 11188, Holography, Diffractive Optics, and Applications IX, 111880X (18 November 2019); doi: 10.1117/12.2535466
Show Author Affiliations
Guowei Zhang Sr., Xi'an Jiaotong Univ. (China)
Beijing Yuguang Technology Development Co., Ltd. (China)
Xiaodong Yin Sr., Beijing Yuguang Technology Development Co., Ltd. (China)
Kehan Tian Sr., Beijing Yuguang Technology Development Co., Ltd. (China)


Published in SPIE Proceedings Vol. 11188:
Holography, Diffractive Optics, and Applications IX
Yunlong Sheng; Changhe Zhou; Liangcai Cao, Editor(s)

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