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Proceedings Paper

Metal-insulator transition (MIT) actuators for microswitching applications
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Paper Abstract

Transitional metal oxides have generated considerable interest in electronics and other engineering applications over the last few decades. These materials show several orders of magnitude metal-insulator transition (MIT) when triggered by an external stimuli. In this paper, an MIT (Vanadium Dioxide (VO2)) -based bimorph cantilever shows promising performance due to its large volumetric work density, ultrafast response, and reliability. This this work, we propose and simulate a cantilever actuated via VO2 for a micro-contact switch. Our results show VO2 based actuators show promising performance in terms of deflection, resonance frequency, and lifetime.

Paper Details

Date Published: 6 December 2019
PDF: 5 pages
Proc. SPIE 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019, 1137108 (6 December 2019);
Show Author Affiliations
Protap Mahanta, Marquette Univ. (United States)
Mohiuddin Munna, Marquette Univ. (United States)
Ronald A. Coutu Jr., Marquette Univ. (United States)


Published in SPIE Proceedings Vol. 11371:
International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019
Partha Banerjee; Karl Gudmundsson; Akhlesh Lakhtakia; Guru Subramanyam, Editor(s)

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