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Proceedings Paper

Metrology for and with nanooptics (Conference Presentation)
Author(s): Thomas Pertsch

Paper Abstract

This Conference Presentation, “Metrology for and with nanooptics,” was recorded at SPIE Optical Metrology 2019, held in Munich, Germany.

Paper Details

Date Published: 2 August 2019
Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 1105704 (2 August 2019); doi: 10.1117/12.2534351
Show Author Affiliations
Thomas Pertsch, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute for Applied Optics and Precision Engineering IOF (Germany)
Max Planck School of Photonics (Germany)

Published in SPIE Proceedings Vol. 11057:
Modeling Aspects in Optical Metrology VII
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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