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Challenge of high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM
Author(s): Hakaru Mizoguchi; Hiroaki Nakarai; Tamotsu Abe; Hiroshi Tanaka; Yukio Watanabe; Tsukasa Hori; Yutaka Shiraishi; Tatsuya Yanagida; Georg Soumagne; Tsuyoshi Yamada; Takashi Saitou
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Paper Abstract

Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength laser pulses for shooting and debris mitigation by magnetic field have been applied. We have developed first practical source for HVM; "GL200E" in 2014. Then it is demonstrated which high average power CO2 laser more than 20kW at output power in cooperation with Mitsubishi Electri. Pilot#1 is up running and it demonstrates HVM capability; EUV power recorded at 111W on average (117W in burst stabilized, 95% duty) with 5% conversion efficiency for 22 hour operation in October 2016. Availability is achievable at 89% (2 weeks average), also superior magnetic mitigation has demonstrated promising mirror degradation rate (= 0.5%/Gp) at 100W or higher power operation with dummy mirror test. We have demonstrated actual collector mirror reflectivity degradation rate is less than 0.4%/Gp by using real collector mirror around 125W (at I/F clean) in burst power during 30 Billion pulses operation. Recently we have redefined target power higher <330W and its development plan. Also we will update latest challenges for <330W average operation with actual collector mirror at the conference.

Paper Details

Date Published: 26 September 2019
PDF: 14 pages
Proc. SPIE 11147, International Conference on Extreme Ultraviolet Lithography 2019, 1114705 (26 September 2019); doi: 10.1117/12.2534147
Show Author Affiliations
Hakaru Mizoguchi, Gigaphoton Inc. (Japan)
Hiroaki Nakarai, Gigaphoton Inc. (Japan)
Tamotsu Abe, Gigaphoton Inc. (Japan)
Hiroshi Tanaka, Gigaphoton Inc. (Japan)
Yukio Watanabe, Gigaphoton Inc. (Japan)
Tsukasa Hori, Gigaphoton Inc. (Japan)
Yutaka Shiraishi, Gigaphoton Inc. (Japan)
Tatsuya Yanagida, Gigaphoton Inc. (Japan)
Georg Soumagne, Gigaphoton Inc. (Japan)
Tsuyoshi Yamada, Gigaphoton Inc. (Japan)
Takashi Saitou, Gigaphoton Inc. (Japan)


Published in SPIE Proceedings Vol. 11147:
International Conference on Extreme Ultraviolet Lithography 2019
Toshiro Itani; Paolo A. Gargini; Patrick P. Naulleau; Kurt G. Ronse, Editor(s)

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