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3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform
Author(s): Takamasa Suzuki; Bin Liu; Samuel Choi
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Paper Abstract

In this study, we propose a spectral-domain optical coherence tomography (OCT) method that employs pulse irradiation to capture an interferogram and continuous wavelet transform (CWT) for data analysis. The pulse irradiation technique enables obtaining an interferogram with a high signal-to-noise ratio, and the CWT allows accurate analysis of a nonstationary signal. Experimental results obtained using a cover glass of thickness 150 μm confirmed that the repetitive measurement error was 0.32 μm. However, this error was reduced to 0.23 μm when pulse irradiation was applied for image capture.

Paper Details

Date Published: 3 September 2019
PDF: 8 pages
Proc. SPIE 11102, Applied Optical Metrology III, 111021A (3 September 2019); doi: 10.1117/12.2534005
Show Author Affiliations
Takamasa Suzuki, Niigata Univ. (Japan)
Bin Liu, Niigata Univ (Japan)
Samuel Choi, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 11102:
Applied Optical Metrology III
Erik Novak; James D. Trolinger, Editor(s)

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