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Proceedings Paper

DNA-based nanofabrication for low-cost, high-resolution patterning
Author(s): Liwei Hui; Haitao Liu
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Paper Abstract

This paper summarizes our work on DNA-based nanofabrication. In the past decade, our group has developed several strategies to employ unmodified DNA nanostructures as templates for high-resolution patterning. We showed that DNA nanostructures can locally modulate vapor phase etching and deposition reactions. As a result, both negative-tone and positive-tone pattern transfers were achieved within one reaction system by adjusting reaction conditions. We also showed that DNA nanostructures can be directly imprinted onto a variety of substrates, including soft polymers and selfassembled monolayer molecules. In these cases, various surface patterns were obtained with the size ranging from micrometer to sub-10 nm. These DNA-patterned substrates have interesting interfacial properties, such as site-specific reactivity and antifouling. Overall, our work highlighted the potentials of DNA-based nanofabrication for high-resolution patterning in electronic and surface engineering applications.

Paper Details

Date Published: 7 October 2019
PDF: 7 pages
Proc. SPIE 11168, Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II, 1116805 (7 October 2019);
Show Author Affiliations
Liwei Hui, Univ. of Pittsburgh (United States)
Haitao Liu, Univ. of Pittsburgh (United States)


Published in SPIE Proceedings Vol. 11168:
Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II
Andrea Camposeo; Yuris Dzenis; Maria Farsari; Luana Persano, Editor(s)

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