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Proceedings Paper

Figuring of fused silica optical surface with thin parts by plasma chemical vaporization machining
Author(s): Hideo Takino; Kazuya Yamamura; Yasuhisa Sano; Yuzo Mori
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Paper Abstract

Our previously developed plasma chemical vaporization machining (CVM) does not apply a load to the surface to be figured during its process. Thus, plasma CVM is expected to be able to process lightweight mirrors having a surface with thin parts supported by ribs with high accuracy. In this study, we investigated the removal characteristics of plasma CVM for fused silica workpieces having thin and thick parts simulating a lightweight mirror. The experimental results showed that such workpieces were processed with a uniform removal depth by placing a fused silica column at the back of the thin part. Moreover, a flat surface having a thin part of 0.6 mm thickness was figured by plasma CVM, where a column was placed in the thin part in the same way as in the fundamental study. As a result, we successfully demonstrated that plasma CVM enables the figuring of an optical surface with thin parts.

Paper Details

Date Published: 2 October 2019
PDF: 6 pages
Proc. SPIE 11168, Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II, 1116809 (2 October 2019);
Show Author Affiliations
Hideo Takino, Chiba Institute of Technology (Japan)
Kazuya Yamamura, Osaka Univ. (Japan)
Yasuhisa Sano, Osaka Univ. (Japan)
Yuzo Mori, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 11168:
Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II
Andrea Camposeo; Yuris Dzenis; Maria Farsari; Luana Persano, Editor(s)

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