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Proceedings Paper • Open Access

Inline thickness measurement with imaging ellipsometry
Author(s): Ferdinand Bammer; Florian Huemer

Paper Abstract

In many coating-lines exact thickness-control is essential. We demonstrate some results with a stroboscopic imaging ellipsometer, which enables to acquire an image of the thickness distribution of a certain layer during or right after production making it an ideal tool for inline-monitoring. The prototype obtains a thickness-distribution with 10-100Hz acquisition rate. The accuracy is in the range 2-10% of the layer thickness. Since there are no moving parts and only monochromatic illumination with a standard laser-diode the solution is cost-effective and can be easily installed. We demonstrate three different applications, namely SiO2 on Si, oil on steel, and MgF2 on glass.

Paper Details

Date Published: 17 September 2019
PDF: 4 pages
Proc. SPIE 11144, Photonics and Education in Measurement Science 2019, 111440H (17 September 2019); doi: 10.1117/12.2531940
Show Author Affiliations
Ferdinand Bammer, Vienna Univ. of Technology (Austria)
Florian Huemer, Vienna Univ. of Technology (Austria)

Published in SPIE Proceedings Vol. 11144:
Photonics and Education in Measurement Science 2019
Maik Rosenberger; Paul-Gerald Dittrich; Bernhard Zagar, Editor(s)

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