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Proceedings Paper

Advanced methods for optical nanometrology (Conference Presentation)
Author(s): Bernd Bodermann

Paper Abstract

This Conference Presentation, "Advanced methods for optical nanometrology," was recorded at SPIE Optical Metrology 2019 held in Munich, Germany.

Paper Details

Date Published: 16 August 2019
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560P (16 August 2019); doi: 10.1117/12.2531868
Show Author Affiliations
Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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