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Characterization of a magnetron sputtering system for the development of broadband x-ray optic multilayer coatings
Author(s): Danielle Gurgew; David M. Broadway; Brian Ramsey
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Paper Abstract

A direct current (DC) magnetron sputtering system has been developed at NASA Marshall Space Flight Center (MSFC) for depositing broadband X-ray optic multilayer coatings. The system has the capability to house up to four, 2-inch diameter direct-cooled DC magnetron cathodes. The relatively small dimensions of the cathodes facilitate low-cost, early stage research and development of various types of optical coatings while producing good coating uniformity across substrates that are twice the cathode diameter. Sources of non-repeatability in the deposition of depth-graded multilayer coatings were identified and compensated for, resulting in the ability to implement complex multilayer coating designs.

Paper Details

Date Published: 9 September 2019
PDF: 13 pages
Proc. SPIE 11119, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX, 111191M (9 September 2019); doi: 10.1117/12.2531713
Show Author Affiliations
Danielle Gurgew, NASA Goddard Space Flight Ctr. (United States)
David M. Broadway, NASA Marshall Space Flight Ctr. (United States)
Brian Ramsey, NASA Marshall Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 11119:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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