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A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers
Author(s): Bernd Grubert; David Kreitschik; Olaf Schnabel; Frank Siewert; Ralf D. Geckeler; Matthias Schumann; Andreas Just; Michael Krause; Tanfer Yandayan; S. Asli Akgoz
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Paper Abstract

A new Aperture Centring Device (ACenD) for precisely positioning small apertures with respect to the autocollimator’s optics has been developed. With the new device, differences in the angle response of autocollimators between the calibration at a laboratory and their subsequent application in the slope measuring profilers are significantly minimized. Evaluation of the device with a circular aperture size of d=2.5 mm was carried out in different laboratories. It was verified that the ACenD is capable of achieving a reproducible aperture alignment < 0.1 mm. The device is a substantial aid for the operation of slope measuring profilometers and enables the measurable, documentable, and transferable positioning of apertures that did not exist before.

Paper Details

Date Published: 9 September 2019
PDF: 14 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110902 (9 September 2019); doi: 10.1117/12.2531613
Show Author Affiliations
Bernd Grubert, MÖLLER-WEDEL OPTICAL GmbH (Germany)
David Kreitschik, MÖLLER-WEDEL OPTICAL GmbH (Germany)
Olaf Schnabel, Schnabel Elektronische Messtechnik (Germany)
Frank Siewert, Helmholtz-Zentrum Berlin (Germany)
Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
Matthias Schumann, Physikalisch-Technische Bundesanstalt (Germany)
Andreas Just, Physikalisch-Technische Bundesanstalt (Germany)
Michael Krause, Physikalisch-Technische Bundesanstalt (Germany)
Tanfer Yandayan, TUBITAK Ulusal Metroloji Enstitüsü (Turkey)
S. Asli Akgoz, TUBITAK Ulusal Metroloji Enstitüsü (Turkey)


Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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