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Proceedings Paper • Open Access • new

Application of DOE in confocal microscopy for surface measurement
Author(s): Zheng Li; Miro Taphanel; Thomas Längle; Jürgen Beyerer

Paper Abstract

In traditional confocal microscopy, there is a trade-off between spatial resolution and field of view due to the limitations of objectives. To solve this problem, diffractive optical elements (DOEs) with overlapping apertures are used to generate high-NA illumination spots in a large area. However, currently such DOEs can only be used as illuminators which are not suitable for 3D surface measurements. In this work, the idea of superposition is utilized to expand the scope of application of the DOEs. These DOEs are designed by simulation and tested in the experiments. The results show that the proposed DOEs can be used in 3D surface measurements and have the potential to solve the problem of high-NA objectives.

Paper Details

Date Published: 17 September 2019
PDF: 8 pages
Proc. SPIE 11144, Photonics and Education in Measurement Science 2019, 1114411 (17 September 2019); doi: 10.1117/12.2531610
Show Author Affiliations
Zheng Li, Fraunhofer Institute of Optronics, System Technologies and Image Exploitation (Germany)
Karlsruhe Institute of Technology (Germany)
Miro Taphanel, Fraunhofer Institute of Optronics, System Technologies and Image Exploitation (Germany)
Thomas Längle, Fraunhofer Institute of Optronics, System Technologies and Image Exploitation (Germany)
Jürgen Beyerer, Fraunhofer Institute of Optronics, System Technologies and Image Exploitation (Germany)
Karlsruhe Institute of Technology (Germany)


Published in SPIE Proceedings Vol. 11144:
Photonics and Education in Measurement Science 2019
Maik Rosenberger; Paul-Gerald Dittrich; Bernhard Zagar, Editor(s)

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