The rule of the distortion introduced by pressure and thermal stresses in the active cooling mirror were proved experimentally. In order to minimize the distortion of a mirror the active cooing mirror should be consisted of a thin faceplate layer, a good heat exchanger layer and a hard rigidity substrate. According to this requirement of a superthin multilayer mirror were designed. Its maximum distortion was only 0.10 micrometers , when the 8.69kw laser beam was incident on the surface of mirror and the coolant pressure was 0.13MPa.

Date Published: 30 September 1996
PDF: 5 pages
Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); doi: 10.1117/12.253150

Published in SPIE Proceedings Vol. 2888:
Laser Processing of Materials and Industrial Applications
Shu-Sen Deng; S. C. Wang, Editor(s)