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Proceedings Paper

Fabrication of LiTaO3 periodic surface structures by a single excimer laser pulse through a phase mask grating
Author(s): Gui-peng Luo; Shining Zhu; Ya-Lin Lu; Yongyuan Zhu; Si-bei Xiong; Zhiguo Liu; Naiben Ming; Hai-Ming Wu; Zu-Hong Lu
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Paper Abstract

Surface corrugations with periodic of 2 micrometers and a depth of approximately 150 nm have been fabricated in lithium tantalate (LiTaO3) monocrystal wafers. Morphologies of the corrugations were studied with an atomic force microscope. These corrugations were first produced by a single excimer laser pulse through a diffractive optical element, and the optical quality of the periodic structures is demonstrated by its characteristics as a gratings coupler in a LiTaO3 planar waveguide.

Paper Details

Date Published: 30 September 1996
PDF: 5 pages
Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); doi: 10.1117/12.253117
Show Author Affiliations
Gui-peng Luo, Nanjing Univ. (China)
Shining Zhu, Nanjing Univ. (China)
Ya-Lin Lu, Nanjing Univ. (China)
Yongyuan Zhu, Nanjing Univ. (China)
Si-bei Xiong, Nanjing Univ. (China)
Zhiguo Liu, Nanjing Univ. (China)
Naiben Ming, CCAST (China) and Nanjing Univ. (China)
Hai-Ming Wu, Southeast Univ. (China)
Zu-Hong Lu, Southeast Univ. (China)

Published in SPIE Proceedings Vol. 2888:
Laser Processing of Materials and Industrial Applications
Shu-Sen Deng; S. C. Wang, Editor(s)

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