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Proceedings Paper

High-accuracy autocollimator calibration by interferometric 2D angle generator
Author(s): V. Heikkinen; V. Byman; M. Shpak; R. Geckeler; A. Just; M. Krause; M. Schumann; A. Lassila
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Paper Abstract

Autocollimators are excellent measuring tools for many applications, such as adjustments or characterizations of precision mechanics, optics and instruments. Autocollimators have several characteristic error sources due to misalignment or nonideality of the collimator lens, the light source and the sensor. To fully characterize errors related to simultaneous engagement of both measurement axes of the autocollimator a two directional angle generator is necessary.

In this paper, VTT MIKES interferometric 2-directional small angle generator (I2D-SAG) with updated model for calibration of autocollimators is described. It generates angles around 2 orthogonal axes with high accuracy. The maximum range of the I2D-SAG is ±1000” for both axes. In calibration of a high quality autocollimator a standard uncertainty below 0.01” can be reached.

In addition, preliminary results of a comparison of I2D-SAG and PTB Spatial Angle Autocollimator Calibrator (SAAC) instrument are presented. This is the first comparison between 2D autocollimator calibration systems. In this comparison, a good agreement was reached in characterization of an electronic autocollimator over 900”×900” range.

Paper Details

Date Published: 9 September 2019
PDF: 10 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110903 (9 September 2019); doi: 10.1117/12.2531023
Show Author Affiliations
V. Heikkinen, National Metrology Institute VTT MIKES (Finland)
V. Byman, National Metrology Institute VTT MIKES (Finland)
M. Shpak, National Metrology Institute VTT MIKES (Finland)
R. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
A. Just, Physikalisch-Technische Bundesanstalt (Germany)
M. Krause, Physikalisch-Technische Bundesanstalt (Germany)
M. Schumann, Physikalisch-Technische Bundesanstalt (Germany)
A. Lassila, National Metrology Institute VTT MIKES (Finland)

Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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