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Proceedings Paper

Analysis of a new piezoelectric multiple-beam-scanning method
Author(s): Bing Ye; Yi Hu
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Paper Abstract

In this paper, we introduce a new type of multi- piezoelectric 2D light scanner and analyze the scanner's principle, characteristics of construction and property.

Paper Details

Date Published: 3 October 1996
PDF: 4 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253088
Show Author Affiliations
Bing Ye, Heifei Univ. of Technology (China)
Yi Hu, Heifei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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