Share Email Print

Proceedings Paper

Stress-releasing procedure approach for an X-ray mirror holder for round-robin measurements
Author(s): S. Schmidtchen; M. Vannoni; I. Freijo-Martin; D. La Civita; H. Sinn
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

For new light sources, like X-ray free-electron lasers (FELs), highly precise diffraction-limited optics are needed, which are leading to ambitious requirements for the X-ray mirrors used in those facilities. For appropriate beam focusing and alignment, a control of the shape on the single-nanometre precision level is necessary, which generates high demands on the manufacturers and on the metrology. To face these questions, the project MooNpics – Metrology On One-Nanometer-Precise Optics was established. With a European-wide round-robin test, the goal is to push the frontiers in mirror metrology in Europe to single-nanometre figure error precision.

Within the MooNpics project, a special mirror holder for long X-ray mirrors was developed that provides reproducible and well defined mounting conditions in each participating laboratory. The goal is to understand mechanical and stress influences and hence to improve mounting methods. Before the actual start of the roundrobin, measurements were done to investigate the influence of the mirror mounting. A procedure was developed to reduce the induced stresses and increase the reproducibility with regard to the planned round-robin.

Paper Details

Date Published: 9 September 2019
PDF: 8 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110904 (9 September 2019); doi: 10.1117/12.2530635
Show Author Affiliations
S. Schmidtchen, European XFEL GmbH (Germany)
M. Vannoni, European XFEL GmbH (Germany)
I. Freijo-Martin, European XFEL GmbH (Germany)
D. La Civita, European XFEL GmbH (Germany)
H. Sinn, European XFEL GmbH (Germany)

Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?