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Proceedings Paper

Research of the technology for edge checkout using laser half focus
Author(s): Haibao Lu; Tingzheng Shen; Yueke Wang; Rui Huang
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Paper Abstract

In this paper, a new method for edge location-laser half- focus edge checkout is introduced. To ensure high precision of the edge checkout, many comprehensive techniques such as self adaptive tracking for compensation, laser modulating and compensating for modulated amplitude, fixed-point sampling technique by differentiation and fine dividing technique for the step of step motor, etc., have been used. A theoretical model for the edge checkout using laser half- focus and the result of computer simulating are also given. In addition, a system of measuring diameter adopting this method is described. The measuring uncertainty 2 (sigma) of the system is within 3 micrometers .

Paper Details

Date Published: 3 October 1996
PDF: 7 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253057
Show Author Affiliations
Haibao Lu, National Univ. of Defense Technology (China)
Tingzheng Shen, National Univ. of Defense Technology (China)
Yueke Wang, National Univ. of Defense Technology (China)
Rui Huang, National Univ. of Defense Technology (China)

Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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