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Proceedings Paper

Measurement of geometrical aberration by holographic gratings
Author(s): Guilin Sun; Xiaoxing Zhang; Ling Du
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Paper Abstract

A new method of geometrical aberration measurement for an optical system with large aperture is proposed by using a series of holographic gratings, which are linearly recorded with 0 and +/- 1 order diffractions or nonlinearly recorded with more order diffractions. According to the aberration property (symmetry or unsymmetry) of the optical system undertest, one or two dimension gratings can be used. Some experimental results are given and related problems are discussed.

Paper Details

Date Published: 3 October 1996
PDF: 6 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253044
Show Author Affiliations
Guilin Sun, Beijing Institute of Machinery Industry (China)
Xiaoxing Zhang, Beijing Institute of Machinery Industry (China)
Ling Du, Beijing Institute of Machinery Industry (China)

Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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