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Proceedings Paper

Three-dimensional shape measurement of an ellipsoidal mirror by industrial x-ray computed tomography
Author(s): Satsuki Shimizu; Yoko Takeo; Gota Yamaguchi; Yutaka Ohtake; Yukie Nagai; Hidekazu Mimura
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Paper Abstract

An ellipsoidal mirror is a soft X-ray reflective focusing device. We are developing precise ellipsoidal mirrors based on an electroforming process. To improve the fabrication process, three-dimensional shape measurements with a high accuracy are required. In this research we develop a method to measure ellipsoidal shapes by industrial X-ray computed tomography (CT). The X-ray CT process consists of measuring the mirror shape and determining the parameters of the ellipsoid. We also evaluate the reproducibility of X-ray CT measurements and clarify that the accuracy is at the 5-m level.

Paper Details

Date Published: 9 September 2019
PDF: 6 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090I (9 September 2019); doi: 10.1117/12.2530321
Show Author Affiliations
Satsuki Shimizu, The Univ. of Tokyo (Japan)
Yoko Takeo, The Univ. of Tokyo (Japan)
Gota Yamaguchi, The Univ. of Tokyo (Japan)
Yutaka Ohtake, The Univ. of Tokyo (Japan)
Yukie Nagai, Tokyo Metropolitan Univ. (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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