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Proceedings Paper

Heterodyne interferometry with surface selectivity and fast response
Author(s): Junjiang Zhang
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Paper Abstract

A heterodyne interferometric system is presented. It is characterized by surface selectivity, high resolution and time saving measurement by using a short coherence length light source and a position sensitive detector. The tilt of a surface under test is converted into the deviation of a light spot from a fiducial point and measured by the position sensitive detector. With such a system an angular resolution of 0.1 second is obtainable.

Paper Details

Date Published: 3 October 1996
PDF: 11 pages
Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253030
Show Author Affiliations
Junjiang Zhang, Leotec Corp. (China)

Published in SPIE Proceedings Vol. 2899:
Automated Optical Inspection for Industry
Frederick Y. Wu; Shenghua Ye, Editor(s)

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