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Proceedings Paper

Robust and objective automatic optical surface inspection using modulated dark field phasing illumination
Author(s): Heejoo Choi; John Kam; Joel D. Berkson; Logan R. Graves; Huang Lei; Dae Wook Kim
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Paper Abstract

Dark field illumination (DFI) is an elegant inspection technique sometimes used to detect particles on a specular surface. However, traditional DFI struggles with repeatability, limiting its applications in automated inspection. We present an improvement to DFI by introducing a modulated dark field illumination (MDFI) that utilizes the phase rather than the intensity in the detection of defects. For modulated dark field illumination (MDFI), the phase-based information is independent from the reflectance of the surface, but has a higher sensitivity to the light scattered from a defect than DFI. As a result, we obtain a robust computational image process method that is insensitive to the environment and provides clearly defined defect information. In order to extend the application to industry, the instantaneous MDFI systems were developed and validated.

Paper Details

Date Published: 3 September 2019
PDF: 8 pages
Proc. SPIE 11102, Applied Optical Metrology III, 1110207 (3 September 2019);
Show Author Affiliations
Heejoo Choi, James C. Wyant College of Optical Sciences, The Univ. of Arizona (United States)
John Kam, James C. Wyant College of Optical Sciences, The Univ. of Arizona (United States)
Joel D. Berkson, James C. Wyant College of Optical Sciences, The Univ. of Arizona (United States)
Logan R. Graves, James C. Wyant College of Optical Sciences, The Univ. of Arizona (United States)
Huang Lei, Tsinghua Univ. (China)
Dae Wook Kim, James C. Wyant College of Optical Sciences, The Univ. of Arizona (United States)
The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 11102:
Applied Optical Metrology III
Erik Novak; James D. Trolinger, Editor(s)

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