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Proceedings Paper

Finite element modeling of a laminar flexure bending mechanism for elliptically bent hard x-ray mirror
Author(s): Jayson W. J. Anton; Deming Shu; Steven P. Kearney; Ross Harder; Xianbo Shi; Tim M. Mooney; Sheikh T. Mashrafi; Jun Qian; Bing Shi; Lahsen Assoufid
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Paper Abstract

Using a compact laminar overconstrained flexure bending mechanism and a capacitive sensor array, a precision compact mirror bending mechanism for 300-mm long hard x-ray mirror has been designed and constructed to perform initial test for x-ray zoom optics as a part of an Argonne Laboratory-Directed Research and Development project at the Advanced Photon Source. A Finite Element Model (FEM) of the mirror bender was created with commercial simulation software. An iterative process of simulations were run to predict accurate bending parameters for the flexure bending mechanism.The FEM simulation demonstrated a result of an elliptically bent trapezoid mirror surface that fit with desired elliptical mirror profile within ±20 nanometers over 86% of the mirror’s measured length. The iteration process of model refinement, results of the finite element simulations, and preliminary test of the capacitive sensor array are discussed in this paper.

Paper Details

Date Published: 30 August 2019
PDF: 9 pages
Proc. SPIE 11100, Optomechanical Engineering 2019, 111000B (30 August 2019); doi: 10.1117/12.2529391
Show Author Affiliations
Jayson W. J. Anton, Argonne National Lab. (United States)
Deming Shu, Argonne National Lab. (United States)
Steven P. Kearney, Argonne National Lab. (United States)
Ross Harder, Argonne National Lab. (United States)
Xianbo Shi, Argonne National Lab. (United States)
Tim M. Mooney, Argonne National Lab. (United States)
Sheikh T. Mashrafi, Argonne National Lab. (United States)
Jun Qian, Argonne National Lab. (United States)
Bing Shi, Argonne National Lab. (United States)
Lahsen Assoufid, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 11100:
Optomechanical Engineering 2019
Keith B. Doyle; Jonathan D. Ellis, Editor(s)

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