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On the characterization of ultra-precise XUV-focusing mirrors by means of slope- measuring deflectometry
Author(s): Frank Siewert; Jana Buchheim; Grzegorz Gwalt; Jens Viefhaus
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Paper Abstract

Slope-measuring deflectometry allows the non-contact measurement of curved surfaces such as ultra-precise elliptical cylindrical mirrors used for the focusing of synchrotron light. This paper will report on the measurement of synchrotron mirrors designed to guide and focus synchrotron light in the variable polarization beamline P04 at the PETRA III synchrotron at DESY (Hamburg). These mirrors were optimized by deterministic finishing technology based on topography data provided by slope-measuring deflectometry. We will show the results of the mirror inspection and discuss the expected beamline performance by ray-tracing results.

Paper Details

Date Published: 9 September 2019
PDF: 11 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090N (9 September 2019); doi: 10.1117/12.2529308
Show Author Affiliations
Frank Siewert, Helmholtz-Zentrum Berlin (Germany)
Jana Buchheim, Helmholtz-Zentrum Berlin (Germany)
Grzegorz Gwalt, Helmholtz-Zentrum Berlin (Germany)
Jens Viefhaus, Helmholtz-Zentrum Berlin (Germany)


Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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