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Proceedings Paper

Visible to mid-infrared integrated sensors for air quality measurement
Author(s): S. Boutami; G. Jobert; P. Barritault; J. G. Coutard; M. Fournier; J. M. Fédéli; P. Labeye; A. Marchant; J. Skubich; A. Teulle; O. Lartigue; E. Lorent; A. Glière; C. Constancias; S. Nicoletti; C. Jamois; C. Seassal; L. Duraffourg
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Paper Abstract

We present several integrated technologies on Silicon, from visible to mid-infrared, for particulate matter and gas detection. We present new concepts to detect in the visible particulate matter with a high sensitivity and a discrimination of both particle sizes and refractive indices. For gas detection, mid-infrared technologies developments include on one hand, microhotplate thermal emitters, as a cheap solution for gas sensing, eventually enhanced by plasmonics, and on the other hand quantum cascade lasers-based photoacoustic sensors, for high precision measurement, and for which the integration on Silicon is pushed forward for a reduction of costs.

Paper Details

Date Published: 9 September 2019
PDF: 7 pages
Proc. SPIE 11088, Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019, 110880R (9 September 2019);
Show Author Affiliations
S. Boutami, Univ. Grenoble Alpes, CEA-LETI (France)
G. Jobert, Univ. Grenoble Alpes, CEA-LETI (France)
P. Barritault, Univ. Grenoble Alpes, CEA-LETI (France)
J. G. Coutard, Univ. Grenoble Alpes, CEA-LETI (France)
M. Fournier, Univ. Grenoble Alpes, CEA-LETI (France)
J. M. Fédéli, Univ. Grenoble Alpes, CEA-LETI (France)
P. Labeye, Univ. Grenoble Alpes, CEA-LETI (France)
A. Marchant, Univ. Grenoble Alpes, CEA-LETI (France)
J. Skubich, Univ. Grenoble Alpes, CEA-LETI (France)
A. Teulle, Univ. Grenoble Alpes, CEA-LETI (France)
O. Lartigue, Univ. Grenoble Alpes, CEA-LETI (France)
E. Lorent, Univ. Grenoble Alpes, CEA-LETI (France)
A. Glière, Univ. Grenoble Alpes, CEA-LETI (France)
C. Constancias, Univ. Grenoble Alpes, CEA-LETI (France)
S. Nicoletti, Univ. Grenoble Alpes, CEA-LETI (France)
C. Jamois, Institut des Nanotechnologies de Lyon, UMR CNRS 5270 (France)
Univ. de Lyon, Ecole Centrale de Lyon (France)
C. Seassal, Institut des Nanotechnologies de Lyon, UMR CNRS 5270 (France)
Univ. de Lyon, Ecole Centrale de Lyon (France)
L. Duraffourg, Univ. Grenoble Alpes, CEA-LETI (France)


Published in SPIE Proceedings Vol. 11088:
Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019
Oleg Mitrofanov, Editor(s)

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