Share Email Print

Proceedings Paper

Revisited grating efficiency maps: predicting diffraction grating performance by use of image analysis programs
Author(s): W. Jark
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Soft X-ray monochromator designers know very well the program, which M. Neviere developed in order to predict the diffraction efficiencies of reflection gratings by use of the rigorous differential method. Infact it is used frequently for the grating parameter optimisation.

Here a simple analytical equation is presented, which predicts for perfect grating profiles diffraction efficiencies, which correspond within 10% to the results with the more rigorous Neviere approach. This empirical equation, which is based on plausible assumptions, facilitates very much systematic studies, which can then easily be presented in the form of isoefficiency maps, which are valid rather generally and which can be further evaluated in simple image analysis programs. Infact such maps will allow one to identify the optimum grating parameters for a given application in a glimpse.

Paper Details

Date Published: 9 September 2019
PDF: 10 pages
Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 111080K (9 September 2019); doi: 10.1117/12.2529250
Show Author Affiliations
W. Jark, Elettra-Sincrotrone Trieste S.C.p.A. (Italy)

Published in SPIE Proceedings Vol. 11108:
Advances in X-Ray/EUV Optics and Components XIV
Ali M. Khounsary; Shunji Goto; Christian Morawe, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?