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Proceedings Paper

High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing
Author(s): T. Barthels; M. Reininghaus; H. Westergeling
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Paper Abstract

High precision multibeam processing is a useful approach to increase the productivity of high precision laser material processing by means of ultrashort pulsed (USP) laser radiation. In the field of micro- and nanostructuring multibeam ultrashort pulsed laser processing attracts increasing attention due to its ability to generate periodic pattern like filters within an economically reasonable time of up to 12.000 holes/sec. Thus, this technology has become relevant for applications in the filtration industry and biotech industry. The developed multibeamscanner (MBS) is capable of drilling holes with extremely small outlet diameters (< 1μm) into various materials with a customized arrangement and a density of more than 10.000 holes per mm². The aim is to investigate how the exit diameter of single-digit sized holes can be further reduced using the multibeamscanner and whether an increase in productivity is possible.

Paper Details

Date Published: 9 September 2019
PDF: 11 pages
Proc. SPIE 11107, Laser Beam Shaping XIX, 111070K (9 September 2019); doi: 10.1117/12.2529219
Show Author Affiliations
T. Barthels, Fraunhofer-Institut für Lasertechnik ILT (Germany)
M. Reininghaus, Fraunhofer-Institut für Lasertechnik ILT (Germany)
H. Westergeling, Fraunhofer-Institut für Lasertechnik ILT (Germany)

Published in SPIE Proceedings Vol. 11107:
Laser Beam Shaping XIX
Angela Dudley; Alexander V. Laskin, Editor(s)

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