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Proceedings Paper

Differential deposition for figure correction of x-ray mirrors
Author(s): Ch. Morawe; S. Labouré; J-Ch. Peffen; F. Perrin; A. Vivo; R. Barrett
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Paper Abstract

Differential deposition techniques were applied to reduce the figure error of x-ray mirrors. Cr layers were sputtered on flat substrates that were moved with variable speed in front of a beam defining aperture. The required velocity profile was calculated using a deconvolution algorithm. The Cr thickness profiles were derived in two ways: directly, using x-ray reflectivity and indirectly, by measuring the surface figure before and after the deposition. After two iterations the mirror surface figure could be improved by almost one order of magnitude. This work will describe the experimental techniques and discuss the achieved accuracy. It will also address open questions such as layer stress, roughness evolution, and limitations of the available instrumentation.

Paper Details

Date Published: 9 September 2019
PDF: 8 pages
Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 1110807 (9 September 2019); doi: 10.1117/12.2528750
Show Author Affiliations
Ch. Morawe, ESRF - The European Synchrotron (France)
S. Labouré, ESRF - The European Synchrotron (France)
J-Ch. Peffen, ESRF - The European Synchrotron (France)
F. Perrin, ESRF - The European Synchrotron (France)
A. Vivo, ESRF - The European Synchrotron (France)
R. Barrett, ESRF - The European Synchrotron (France)

Published in SPIE Proceedings Vol. 11108:
Advances in X-Ray/EUV Optics and Components XIV
Ali M. Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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