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Proceedings Paper

Setup of a confocal nanoscope in reflection using a super-oscillatory lens
Author(s): Arvind Nagarajan; Marijn Siemons; L. Pjotr Stoevelaar; Fabrizio Silvestri; Venu Gopal Achanta; Stefan M. B. Bäumer; Giampiero Gerini
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Paper Abstract

In this paper, we discuss the setup of a confocal nanoscope in reflection using a super-oscillatory lens (SOL)which offers a sub-diffracted focal spot with an ultra-short depth of focus (≈100 nm). A tolerance of 20 nm defocussing in a 10 μm travel range is thus necessary, translating to an alignment requirement of the stage, with respect to the optical axis, below 2 mrad. We discuss an iterative procedure to fine tune the stage movement to achieve this requirement. We also demonstrate the necessity of the alignment by imaging a 5μm long 1D array of rectangular shaped Au nanostructures with a periodicity of 500 nm

Paper Details

Date Published: 3 September 2019
PDF: 5 pages
Proc. SPIE 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, 110892E (3 September 2019);
Show Author Affiliations
Arvind Nagarajan, Technische Univ. Eindhoven (Netherlands)
TNO (Netherlands)
Marijn Siemons, Delft University of Technology (Netherlands)
Utrecht Univ. (Netherlands)
L. Pjotr Stoevelaar, Technische Univ. Eindhoven (Netherlands)
TNO (Netherlands)
Fabrizio Silvestri, TNO (Netherlands)
Venu Gopal Achanta, Tata Institute of Fundamental Research (India)
Stefan M. B. Bäumer, TNO (Netherlands)
Giampiero Gerini, Technische Univ. Eindhoven (Netherlands)
TNO (Netherlands)


Published in SPIE Proceedings Vol. 11089:
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI
Balaji Panchapakesan; André-Jean Attias, Editor(s)

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