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Proceedings Paper

Specification of aspherical surfaces used as refractive elements in micro-optical systems
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Paper Abstract

The optical performance of refractive plano-convex microlenses is mainly related to the quality of their (a)spherical surface. An efficient tolerancing of this surface is a key step towards the manufacturing of high quality microlenses. However, we demonstrate that the intuitive approach based on geometric parameters such as radius of curvature, conic constant and irregularity is ineffective. We thus propose to use common optical figures of merit, RMS spot size and wavefront aberration, to specify the surface. Not much complexity is added since both quantities can be expressed as analytical functions of the surface in the case of plano-convex microlenses. Such surface specification via direct evaluation of the optical performance offers a better control of the microlens quality.

Paper Details

Date Published: 30 August 2019
PDF: 8 pages
Proc. SPIE 11103, Optical Modeling and System Alignment, 1110309 (30 August 2019);
Show Author Affiliations
Jeremy Béguelin, SUSS MicroOptics SA (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Wilfried Noell, SUSS MicroOptics SA (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)


Published in SPIE Proceedings Vol. 11103:
Optical Modeling and System Alignment
Mark A. Kahan; José Sasián; Richard N. Youngworth, Editor(s)

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