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Proceedings Paper

Direct laser writing of submicrometric voxels in two-photon photopolymerization
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Paper Abstract

Direct laser writing based on two-photon polymerization is one of the most advanced techniques to fabricate multifunctionally advanced micro- devices. The voxel is considered as a feature key to control the resolution of the fabricated microstructures. The fabricated voxel can be much smaller than the cube of the laser wavelength, λ3 . To achieve a high resolution, it is known from a long literature that low laser intensity is needed. Oppositely, we introduce a new approach to control the spatial resolution by combining high laser intensity and fast writing speed. By using this approach, a resolution of ~36 𝑛𝑚, e.g. ~1/21 λ, is achieved. In this paper, we investigate on the improvement of the spatial resolution by using a systematic nanofabrication process which we developed. We discuss the factors influencing the resolution, including the laser intensity, the exposure time and the scanning speed by fabricating polymerized- voxels, nanolines and suspended nanofibers connecting two voxels. Lastly, we have fabricated stable 3D microstructures with a sub-diffraction-limit accuracy.

Paper Details

Date Published: 30 August 2019
PDF: 9 pages
Proc. SPIE 11098, Molecular and Nano Machines II, 110980G (30 August 2019); doi: 10.1117/12.2528439
Show Author Affiliations
Yahya Bougdid, Univ. Mohammed V de Rabat (Morocco)
Moroccan Foundation for Advanced Science, Innovation and Research (Morocco)
Youssef El Idrissi, Univ. Mohammed V de Rabat (Morocco)
Imad Maouli, Moroccan Foundation for Advanced Science, Innovation and Research (Morocco)
Zouheir Sekkat, Univ. Mohammed V de Rabat (Morocco)
Moroccan Foundation for Advanced Science, Innovation and Research (Morocco)
Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 11098:
Molecular and Nano Machines II
Zouheir Sekkat; Takashige Omatsu, Editor(s)

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