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Proceedings Paper

Slope error correction of bendable gratings with an in-situ long trace profiler for the soft x-ray beamline at National Synchrotron Radiation Research Center (NSRRC) (Conference Presentation)

Paper Abstract

To achieve an ultrahigh resolution for soft X-ray beamlines at Taiwan Photon Source (TPS), the slope error of a highly precise grating is required on level of 0.1 μrad (rms) under thermal loading with various curvatures. On the beamline, some optics are usually operating under high power density from undulator magnet, the thermal load will introduce a thermal bump on the optics profile and degrade the beamline performance, such as energy resolution and beam size. To realize the high resolution goal, a specially designed bender with 25 actuators for the grating is designed and a In situ long trace profiler (LTP) with precision of 0.1 μrad (rms) has been developed to measure the mirror profile in soft X-ray beamlines. This article introduces the design and construction of in situ LTP. It can provide a feedback guideance for the adjustment of actuators of bender mechanism to achieve the optium profile. A suitable adjustment procedure from the input of in-situ LTP , performance of bender and energy spectrums are presented. There are several benders as the active mirrors and active gratings in operation in TPS 41A resonant inelastic X-ray scattering (RIXS) and TPS 45A angle-resolved photoemission spectroscopy (ARPES) beamlines. In the meantime, three in situ LTPs have been developed to monitor the grating profile under the thermal load in the beamlines. They are providing a feedback to measure the surface figure and to find the optimal surface profile. They would increase our efficiency to reach the energy resolving power of 35,000 and 28,000 in the RIXS and ARPES beamlines, respectively.

Paper Details

Date Published: 9 September 2019
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090D (9 September 2019); doi: 10.1117/12.2528382
Show Author Affiliations
Shang-Wei Lin, National Synchrotron Radiation Research Ctr. (Taiwan)
Duan-Jen Wang, National Synchrotron Radiation Research Ctr. (Taiwan)
Chih-Yu Hua, National Synchrotron Radiation Research Ctr. (Taiwan)
Hok-Sum Fung, National Synchrotron Radiation Research Ctr. (Taiwan)
Ming-Ying Hsu, National Synchrotron Radiation Research Ctr. (Taiwan)
Gung-Chian Yin, National Synchrotron Radiation Research Ctr. (Taiwan)

Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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