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Proceedings Paper

Development of high-resolution full-field x-ray microscope based on multilayer advanced Kirkpatrick-Baez mirrors (Conference Presentation)

Paper Abstract

Spatial resolution of full-field X-ray microscopes based on total-reflection mirrors was limited by grazing-incidence angle of the mirrors. At practical conditions, achievable spatial resolution is approximately 30 nm. To overcome the limitation, multilayer advanced Kirkpatrick-Baez mirrors and full-field X-ray microscopes with this objective mirrors have been developed in Osaka University and RIGAKU Corp. One of the remarkable points in this design is an achievable spatial resolution of less than 20 nm owing to large grazing-incidence angle and multilayer (Pt/C) with narrow period. Also, the advanced Kirkpatrick-Baez mirrors comprise two mirror pairs based on the Wolter type I and type III optics, respectively, to have sufficiently large magnification even at a compact setup with the whole length of 2 m (between a sample and a camera). The compactness makes it possible to apply the optics to laboratory-based X-ray microscopes, which is another ongoing project. A performance test using a Siemens star chart at an X-ray energy of 8 keV was performed in SPring-8 BL29XUL. The results showed lines with approximately 30-nm width could be resolved. Also, tests of stability and energy dependence confirmed usability of this system.

Paper Details

Date Published: 9 September 2019
Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 1111207 (9 September 2019); doi: 10.1117/12.2528366
Show Author Affiliations
Satoshi Matsuyama, Osaka Univ. (Japan)
Jumpei Yamada, Osaka Univ. (Japan)
Taku Hagiwara, Osaka Univ. (Japan)
Kazuhiko Omote, Rigaku Corp. (Japan)
Raita Hirose, Rigaku Corp. (Japan)
Yoshihiro Takeda, Rigaku Corp. (Japan)
Yoshiki Kohmura, RIKEN SPring-8 (Japan)
Makina Yabashi, RIKEN SPring-8 Ctr. (Japan)
Tetsuya Ishikawa, RIKEN SPring-8 Ctr. (Japan)
Kazuto Yamauchi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 11112:
X-Ray Nanoimaging: Instruments and Methods IV
Barry Lai; Andrea Somogyi, Editor(s)

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