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Proceedings Paper

A MEMS mirror driver ASIC for beam-steering in scanning MEMS-based LiDAR
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Paper Abstract

In this paper, a MEMS mirror driver ASIC that operates a 1D MEMS mirror with accurate amplitude is presented. It provides a set of position signals, precisely aligned to the MEMS mirror that enables a beam forming and laser shooting scheduling for LiDAR (Light Detection and Ranging) applications. The proposed architecture exploits a capacitive sense method and integrated control loops to sense, actuate and control the movements of the MEMS mirror. The implemented mixed-signal ASIC is fabricated in 130 nm CMOS technology, and can attain an RMS pointing error of less than 4m°for any tested MEMS mirror amplitude.

Paper Details

Date Published: 9 September 2019
PDF: 8 pages
Proc. SPIE 11107, Laser Beam Shaping XIX, 111070C (9 September 2019);
Show Author Affiliations
Ievgeniia Maksymova, Infineon Technologies Austria AG (Austria)
Graz Univ. of Technolog (Austria)
Philipp Greiner, Infineon Technologies Austria AG (Austria)
Johannes Wiesmeier, Infineon Technologies Austria AG (Austria)
Franz Darrer, Infineon Technologies Austria AG (Austria)
Norbert Druml, Infineon Technologies Austria AG (Austria)


Published in SPIE Proceedings Vol. 11107:
Laser Beam Shaping XIX
Angela Dudley; Alexander V. Laskin, Editor(s)

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