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Proceedings Paper

Development of 120-mm-long ellipsoidal mirror for soft x-ray microscopy
Author(s): T. Kume; H. Hashizume; K. Hiraguri; Y. Imamura; H. Miyashita; T. Mukoda; Y. Matsuzawa; G. Yamaguchi; Y. Takeo; T. Shimamura; Y. Senba; H. Kishimoto; H. Ohashi; H. Mimura
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Paper Abstract

Ellipsoidal mirrors are ideal focusing optics for soft x-rays because of advantages that include high numerical aperture, high efficiency, and no chromatic aberrations. Shape accuracy of nanometer order is required on the internal surface of a mirror with a diameter of around 10 mm. Because of the difficulty of processing the internal surface, ellipsoidal mirrors are fabricated by replication of the shapes of master mandrels. In previous studies, a fabrication process was developed for x-ray ellipsoidal mirrors involving mandrel fabrication and nickel electroforming. 40-mm-long ellipsoidal mirrors were fabricated and a focused beam with full width at half maximum (FWHM) of 240 nm was obtained. For better focusing performance and expansion of the applicable energy range, we designed and fabricated a 120-mm-long ellipsoidal mirror from the master mandrel with a shape accuracy of 3.8 nm (root mean square). A focusing experiment was also performed at the synchrotron radiation facility, SPring-8 (BL25SU). A focused beam with FWHM of 1 μm was obtained.

Paper Details

Date Published: 9 September 2019
PDF: 6 pages
Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 1110806 (9 September 2019);
Show Author Affiliations
T. Kume, Natsume Optical Corp. (Japan)
H. Hashizume, Natsume Optical Corp. (Japan)
K. Hiraguri, Natsume Optical Corp. (Japan)
Y. Imamura, Natsume Optical Corp. (Japan)
H. Miyashita, Natsume Optical Corp. (Japan)
T. Mukoda, Natsume Optical Corp. (Japan)
Y. Matsuzawa, Natsume Optical Corp. (Japan)
G. Yamaguchi, The Univ. of Tokyo (Japan)
Y. Takeo, The Univ. of Tokyo (Japan)
Japan Synchrotron Radiation Research Institute (Japan)
T. Shimamura, The Univ. of Tokyo (Japan)
Y. Senba, Japan Synchrotron Radiation Research Institute (Japan)
H. Kishimoto, Japan Synchrotron Radiation Research Institute (Japan)
H. Ohashi, Japan Synchrotron Radiation Research Institute (Japan)
H. Mimura, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 11108:
Advances in X-Ray/EUV Optics and Components XIV
Ali M. Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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