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Proceedings Paper

Research on the surface shape testing and close-loop performance of a deflectometry system
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Paper Abstract

The Shack-Hartmann wavefront sensor (SHWFS) is widely used in an adaptive optics (AO) system to measure the wavefront. The measurement accuracy of the SHWFS is limited by the micro-lens array, which is a core component of it. A deflectometry system (DS) is constructed to offer a high resolution measurement for the AO system, which could be used to test the surface shape of the deformable mirror (DM). The configuration and principle of the DS are presented. The surface shape testing and close-loop performance are analyzed in simulation and experiment. Results show that the DS has good ability in surface shape testing and close-loop correction.

Paper Details

Date Published: 9 September 2019
PDF: 7 pages
Proc. SPIE 11107, Laser Beam Shaping XIX, 111070G (9 September 2019); doi: 10.1117/12.2528256
Show Author Affiliations
Yamin Zheng, Tsinghua Univ. (China)
Lei Huang, Tsinghua Univ. (China)
Chuang Sun, Tsinghua Univ. (China)
Licheng Sun, Tsinghua Univ. (China)
Shibing Lin, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 11107:
Laser Beam Shaping XIX
Angela Dudley; Alexander V. Laskin, Editor(s)

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