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Proceedings Paper

Laser beam shaping with computer-generated holograms for fiducial marking
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Paper Abstract

The laser marking method has obvious advantages over other available marking methods in speed, accuracy, and flexibility. Mask marking and beam deflection marking are typical methods, each having advantages and disadvantages. In the former, an opaque mask is directly imaged to create the desired mark. This method is practical and relatively fast, but most of the marking energy is blocked, losing efficiency. Additionally, this method requires a precise and bulky lens system. In the latter method, the focused beam is steered onto the sample, writing point by point. This technique has higher flexibility between marks, but it is slow, requires micro-movements, and accurate micro-motion parts are very expensive. We propose an innovative, holographic approach in laser marking. In the new system, a holographic projection system based on a digitally designed computer-generated hologram (CGH) is employed. This specially designed, fully transparent, phase only CGH modulates the high-power writing beam to create any desired image in the far field, where the beam etches a permanent mark of that image onto the designated silicon wafer substrate. Holographic marking combines the advantages of mask and beam deflection marking methods, such as high speed and stationary operation with minimal power loss, in a relatively simple and inexpensive setup. Also, since the holographic projection maintains its image quality after a certain distance, the setup is less prone to spatial alignment errors. We believe that the proposed technique will make significant contributions in the field of laser marking.

Paper Details

Date Published: 9 September 2019
PDF: 7 pages
Proc. SPIE 11107, Laser Beam Shaping XIX, 111070H (9 September 2019); doi: 10.1117/12.2528020
Show Author Affiliations
A. Alkan Gulses, Luminit LLC (United States)
Shaildhish Rai, Luminit LLC (United States)
Joy Padiyar, Luminit LLC (United States)
Shannon Crowley, Luminit LLC (United States)
Alex Martin, Luminit LLC (United States)
Gabriel Islas, Luminit LLC (United States)
Russell M. Kurtz, Luminit LLC (United States)
Thomas Forrester, Luminit LLC (United States)
Daric Guimary, Defense Microelectronics Activity (United States)

Published in SPIE Proceedings Vol. 11107:
Laser Beam Shaping XIX
Angela Dudley; Alexander V. Laskin, Editor(s)

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