We have been developing a compact and lightweight X-ray micropore optics for small satellite mounting. We achieved three-dimensional machining into a single flat glass substrate by femtosecond laser irradiation and wet etching. In addition to the three-dimensional machining, we applied annealing and magnetic fluid polishing to reduce surface roughness of inner walls, and coated the surface with Pt layer by ALD to improve the reflectance. In this paper, we introduce our achievement on micromachining into a single flat glass substrate. As principle verification, we achieved extremely small hole with 2μm diameter and 100μm depth, slit with 10μm width, 2500(50×50) multiple through holes in 26μm pitch and hole angle control within 0.15 degree. We will further develop manufacturing techniques and explore other applications of our micropore optics, such as fundamental research, security inspection and infrastructure inspection.

Date Published: 9 September 2019
PDF: 10 pages
Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 111080V (9 September 2019); doi: 10.1117/12.2527945

Published in SPIE Proceedings Vol. 11108:
Advances in X-Ray/EUV Optics and Components XIV
Ali M. Khounsary; Shunji Goto; Christian Morawe, Editor(s)