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Proceedings Paper

Transparent element surface measurement using binary pattern in phase-measuring deflectometry
Author(s): Ruiyang Wang; Dahai Li
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Paper Abstract

For on-line surface measurement of transparent optical elements, phase measuring deflectometry (PMD) is a very promising method. However, the parasitic reflection from the rear surface is an existing problem for PMD to measure transparent element. A parasitic reflection eliminating method using binary pattern is proposed, the principle of which is described in detail. And the proposed method is implemented on a transparent window glass with a thickness of about 10mm. The surface shape result shows a good agreement with the interferometer data with a sub-wavelength level accuracy.

Paper Details

Date Published: 9 September 2019
PDF: 7 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090P (9 September 2019); doi: 10.1117/12.2527718
Show Author Affiliations
Ruiyang Wang, Sichuan Univ. (China)
Dahai Li, Sichuan Univ. (China)

Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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