
Proceedings Paper
Spectrally-resolved white-light phase-shifted interferometry for 3D measurements of multilayer filmsFormat | Member Price | Non-Member Price |
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Paper Abstract
As a summary of of the authors' previous paper of Ref 1, we describe a new scheme of a Linnik interferometric configuration based on spectrally-resolved white-light interferometry for simultaneous measurement of top surface and its underlying film surfaces in multilayer film structure. Our proposed technique enables accurate measurements of the phase and reflectance over a large range of wavelengths using the iterative least-squares phase-shifting algorithm by suppressing critical phase shift errors, and it provides a better measurement result than conventional methods. To verify our method a complex multilayer film was prepared and we measured it, and compared with well-known conventional techniques. Comparison results show our new method successfully works well with high precision as same as existing methods.
Paper Details
Date Published: 21 June 2019
PDF: 5 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105631 (21 June 2019); doi: 10.1117/12.2527587
Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)
PDF: 5 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105631 (21 June 2019); doi: 10.1117/12.2527587
Show Author Affiliations
Young-Sik Ghim, Korea Research Institute of Standards and Science (Korea, Republic of)
Univ. of Science and Technology (Korea, Republic of)
Univ. of Science and Technology (Korea, Republic of)
Hyug-Gyo Rhee, Korea Research Institute of Standards and Science (Korea, Republic of)
Univ. of Science and Technology (Korea, Republic of)
Univ. of Science and Technology (Korea, Republic of)
Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)
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