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Proceedings Paper

High-resolution ptychoraphic imaging of large-scale integrated circuits (Conference Presentation)
Author(s): Yi Jiang; Junjing Deng; Jeffrey A. Klug; Yudong Yao; Curt A. Preissner; Christian Roehrig; Zhonghou Cai; Barry Lai; Stefan Vogt

Paper Abstract

X-ray ptychography has become a standard technique for imaging materials at <10 nanometer spatial resolution. Recent developments have shown its potential in obtaining quantitative images of the 2D/3D structure of large objects at millimeter and centimeter-scale, which requires not only new instrumentation and experiment design, but high-throughput workflow for data processing. At Argonne’s Advanced Photon Source, we imaged an integrated chip with over 600 × 600 µm^2 field of view at sub-20 nm spatial resolution and achieved 3000 Hz data acquisition rate with advanced motion control. Here, we discuss challenges in achieving large-area reconstruction and explore strategies for streamlining data processing. We demonstrate a novel data acquisition scheme that combines the merits of both step scan and (continuous) fly scan. Inaccurate scan position and large beam variation also degrade image quality and need to be corrected during reconstruction.

Paper Details

Date Published: 9 September 2019
Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120F (9 September 2019); doi: 10.1117/12.2527505
Show Author Affiliations
Yi Jiang, Argonne National Lab. (United States)
Junjing Deng, Argonne National Lab. (United States)
Jeffrey A. Klug, Argonne National Lab. (United States)
Yudong Yao, Argonne National Lab. (United States)
Curt A. Preissner, Argonne National Lab. (United States)
Christian Roehrig, Argonne National Lab. (United States)
Zhonghou Cai, Argonne National Lab. (United States)
Barry Lai, Argonne National Lab. (United States)
Stefan Vogt, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 11112:
X-Ray Nanoimaging: Instruments and Methods IV
Barry Lai; Andrea Somogyi, Editor(s)

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