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Proceedings Paper

Femtosecond laser micromachining of Fabry-Pérot interferometers in fused silica for refractive index sensing
Author(s): João M. Maia; Vítor A. Amorim; Duarte Viveiros; P. V. S. Marques
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Paper Abstract

A Fabry-Pérot interferometer was fabricated inside a fused silica substrate through femtosecond laser micromachining. The influence of the waveguide’s writing parameters on the measured signal’s quality was studied for an interferometer with a 27-μm wide cavity. Optimal signal-to-noise ratio and fringe visibility were obtained for waveguides written at 75 nJ and 50 μm/s. The same device was characterized with different refractive index liquids, and a maximum sensitivity of 1181.4±23.6 nm/RIU was obtained in the index range of 1.2962 to 1.3828 (at 1550 nm) for the spectral order 𝑚 = 46.

Paper Details

Date Published: 3 October 2019
PDF: 6 pages
Proc. SPIE 11207, Fourth International Conference on Applications of Optics and Photonics, 1120712 (3 October 2019); doi: 10.1117/12.2527302
Show Author Affiliations
João M. Maia, INESC-TEC (Portugal)
Univ. of Porto (Portugal)
Vítor A. Amorim, INESC-TEC (Portugal)
Univ. of Porto (Portugal)
Duarte Viveiros, INESC-TEC (Portugal)
Univ. of Porto (Portugal)
P. V. S. Marques, INESC-TEC (Portugal)
Univ. of Porto (Portugal)

Published in SPIE Proceedings Vol. 11207:
Fourth International Conference on Applications of Optics and Photonics
Manuel Filipe P. C. M. Martins Costa, Editor(s)

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