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Proceedings Paper

Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry
Author(s): Marc Wendel
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Paper Abstract

A comparison of two different measurement approaches, a tactile profilometer as well as a non-contact point-probe based metrology system, is conducted. The properties of each approach are highlighted, and measurement results examined.

Paper Details

Date Published: 28 June 2019
PDF: 7 pages
Proc. SPIE 11171, Sixth European Seminar on Precision Optics Manufacturing, 1117109 (28 June 2019); doi: 10.1117/12.2526734
Show Author Affiliations
Marc Wendel, Ametek GmbH (Germany)

Published in SPIE Proceedings Vol. 11171:
Sixth European Seminar on Precision Optics Manufacturing
Rolf Rascher; Christian Schopf, Editor(s)

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