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Proceedings Paper

Simulation analysis of a thin film semiconductor MMI 3dB splitter operating in the visible range
Author(s): Paulo Lourenço; Alessandro Fantoni; Manuela Vieira
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Paper Abstract

In this paper we present a simulation study that intends to characterize the influence of defects introduced by manufacturing processes on the geometry of a semiconductor structure suitable to be used as a multimode interference (MMI) 3 dB power splitter. Consequently, these defects will represent refractive index fluctuations which, on their turn, will drastically affect the propagation conditions within the structure. Our simulations were conducted on a software platform that implements both Beam Propagation and FDTD numerical methods. This work supports the development of a biomedical plasmonic sensor, which is based on the coupling between the propagating modes in a dielectric waveguide and the surface plasmon mode that is generated on an overlaid metallic thin film, and where the output readout is achieved through an a-Si:H photodiode. By using a multimode interference 1×2 power splitter, this sensor device can utilize the non-sensing arm as a reference one, greatly facilitating its calibration and enhanced performance. Amorphous silicon can be deposited by PECVD processes at temperatures lower than 300°C, an attractive characteristic which makes it back-end compatible to CMOS fabrication processes. As the spectral sensitivity of amorphous silicon is restricted to the visible range, this sensing device should be operating on a wavelength not higher than 700 nm, thus a- SiNx has been the material hereby proposed for both waveguides and MMI power splitter.

Paper Details

Date Published: 3 October 2019
PDF: 4 pages
Proc. SPIE 11207, Fourth International Conference on Applications of Optics and Photonics, 112070J (3 October 2019); doi: 10.1117/12.2526656
Show Author Affiliations
Paulo Lourenço, Univ. Nova de Lisboa (Portugal)
Alessandro Fantoni, Instituto Politécnico de Lisboa (Portugal)
Univ. Nova de Lisboa (Portugal)
Manuela Vieira, Instituto Politécnico de Lisboa (Portugal)
Univ. Nova de Lisboa (Portugal)

Published in SPIE Proceedings Vol. 11207:
Fourth International Conference on Applications of Optics and Photonics
Manuel Filipe P. C. M. Martins Costa, Editor(s)

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