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Proceedings Paper

Label-free 3D super-resolution nanoscope
Author(s): I. Kassamakov; G. Maconi; M. Järvinen; A. Nolvi; T. Vainikka; P. Raatikainen; T. Arstila; T. Ylitalo; I. Ninca; K. Ahlers; E. Hæggström
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Paper Abstract

Scanning White Light Interferometry is a non-contacting method for three-dimensional (3D) surface characterization that provides Angstrom level vertical resolution and diffraction limited lateral resolution. This lateral resolution can be improved by implementing a photonic nanojet (PNJ) generating structure. The new method - Photonic Nanojet Interferometry (PNI) allows nanometer vertical resolution and lateral resolution better than 100 nm. In this work, a new design of a PNI system is proposed. The PNJ generating structure is a high refractive index microsphere embedded in a polymer material. We model the entire PNI objective in commercial software (Rsoft FullWAVE) and choose optimal parameters for the construct in such a way, that the working distance (FoV) is maximized while the width of the PNJ is kept below the diffraction limit. To test the new system, we imaged the data layer of a recordable Blu-ray Disc (BD). The results show that the proposed interferometer has two times higher magnification and two times larger field of view compared to the previous design featuring a 11 μm melamine formaldehyde micro-sphere. The new design also increases the fringe contrast by 1.5 times and provides easier handling of big samples by allowing them to be scanned.

Paper Details

Date Published: 21 June 2019
PDF: 8 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560S (21 June 2019); doi: 10.1117/12.2526111
Show Author Affiliations
I. Kassamakov, Univ. of Helsinki (Finland)
Nanojet Inc. (Finland)
G. Maconi, Univ. of Helsinki (Finland)
M. Järvinen, Nanojet Inc. (Finland)
A. Nolvi, Univ. of Helsinki (Finland)
T. Vainikka, Nanojet Inc. (Finland)
P. Raatikainen, Nanojet Inc. (Finland)
T. Arstila, Nanojet Inc. (Finland)
T. Ylitalo, Nanojet Inc. (Finland)
I. Ninca, Univ. of Helsinki (Finland)
K. Ahlers, Nanojet Inc. (Finland)
E. Hæggström, Univ. of Helsinki (Finland)

Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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