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Proceedings Paper

Microsphere-assisted imaging of sub-diffraction-limited features
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Paper Abstract

Observation of nanoscale elements through an optical microscope is often restricted by the resolving power of the optical system. Indeed, a white-light microscope allows the visualisation of objects having a size that is only just greater than half of the wavelength of the illumination used, in ideal cases, such as features of MOEMS- based components. In reality, imperfections or misalignment of the optical components makes this resolution limit worse. In 2011, Wang et al. introduced experimentally the phenomenon of two-dimensional super-resolution imaging through a glass microsphere. They showed that microsphere-assisted microscopy distinguishes itself from others by being able to perform label-free and full-field acquisitions. In addition, with only slight modifications of a classical white-light microscope, microsphere-assisted microscopy makes it possible to reach a lateral resolution of a few hundred nanometers. Recently, we successfully demonstrated the label-free combination of microsphere- assisted microscopy with interferometry. This work aims to compare performance of 2D imaging (microsphere- assisted microscopy) with 3D imaging (microsphere-assisted interference microscopy).

Paper Details

Date Published: 21 June 2019
PDF: 9 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560R (21 June 2019); doi: 10.1117/12.2526086
Show Author Affiliations
Sébastien Marbach, ICube, Univ. of Strasbourg, CNRS (France)
Stephane Perrin, ICube, Univ. of Strasbourg, CNRS (France)
Paul Montgomery, ICube, Univ. of Strasbourg, CNRS (France)
Manuel Flury, ICube, Univ. of Strasbourg, CNRS (France)
Sylvain Lecler, ICube, Univ. of Strasbourg, CNRS (France)

Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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