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Proceedings Paper

One-dimensional ion-beam figuring solution from Brookhaven National Laboratory
Author(s): Tianyi Wang; Lei Huang; Matthew Vescovi; Dennis Kuhne; Kashmira Tayabaly; Nathalie Bouet; Mourad Idir
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Paper Abstract

We demonstrate a novel One-Dimensional Ion-Beam Figuring (1D-IBF) solution from Brookhaven National Laboratory. Three improvements are introduced to the new 1D-IBF system. First, the misalignment of the coordinate systems between the metrology and the 1D-IBF hardware is minimized by integrating both the sample mirror and the Beam Removal Function (BRF) mirror into a single mirror holder. The measured BRF center is then used as a reference to calibrate the coordinate correspondence. Second, a Constrained Linear Least-Squares (CLLS) algorithm with a coarse-to-fine scheme is proposed to keep the non-negativity of the dwell time as well as ensure it smoothly duplicate the required removal amount. Third, a dwell time slicing strategy is used to smooth the implementation of the dwell time in the real 1D-IBF fabrication process. Experimental results demonstrate that the proposed 1D-IBF solution reduces the residual profile errors to sub-nanometer Root Mean Square (RMS) for both flat and spherical mirrors.

Paper Details

Date Published: 9 September 2019
PDF: 8 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110909 (9 September 2019);
Show Author Affiliations
Tianyi Wang, Brookhaven National Lab. (United States)
Lei Huang, Brookhaven National Lab. (United States)
Matthew Vescovi, Brookhaven National Lab. (United States)
Dennis Kuhne, Brookhaven National Lab. (United States)
Kashmira Tayabaly, Brookhaven National Lab. (United States)
Nathalie Bouet, Brookhaven National Lab. (United States)
Mourad Idir, Brookhaven National Lab. (United States)


Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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